PNG  IHDR/gpPLTEU~ pHYs+IDAThZAP Kł%G&b@&K|y̗<\i2qFO\1}^`q/>1iY#;9st% _ 1[c qua'[L <{Gp|1qv LW5 Ep ~ (nm)>$\ F]X;eabv SOmX2'&k+«JF@GhœT)/[-rS~uz<2NVZnϣÆ IJP(Qz/aDmd'-6ļ 8dՄ0#SrvC՝30m-.3YMr%!c3q<裰5K ᆈ}lO26UYY?Vaע7=Cy0Cv`ٛQ㇙RQ!)0e/*_>z(ۧ [`);NEuoF}#L4OnsmbɅf[!%=jWza;_=;ru5bԴ2tشb= 1[رU zXugvB&ˢhMj0CɺuB Mthߛ)r=CE6\Bc hh)利 ؑ'{_YY?UIiZNn8aH+m{lGLhgJLS֥4HcR-f:,X^kL˘aV<6uj*Oig'|9+Fa4-KjhU%+DJy:o&3*5J=0dL$+.2)8Ia#IENDB`